When the piezoelectric driver receives a sine wave voltage signal of 0-10 V, the angle change curve of the micro-motion platform around the Z axis is obtained, as shown in Figure 12.
When the ballast driver is subjected to a sine wave voltage signal of 0 to 10 V, the curve of the rotation angle of the micro-platform around the Z axis is obtained, as shown in Figure 12.
When the piezoelectric driver receives the sine wave voltage signal of 0 ~ 10 V, the rotation angle curve of the micro motion platform around the Z axis is obtained, as shown in FIG. 12.