The above chapters introduce the design, modeling and experimental process of the nano positioning platform. The lever mechanism is used as the output end of Scott Russell mechanism, and a driver is used to realize the pure center rotation of the nano positioning platform, which avoids the characteristics of huge structure and drive redundancy; the blade flexure hinge is used to improve the lateral stiffness; through the analysis of kinematics and dynamics model, the nano positioning platform is realized The platform has the characteristics of large rotation range and high natural vibration frequency. The structural parameters are optimized by finite element analysis to improve its performance. The experimental results show that the nano positioning platform has high precision rotation operation, and the rotation range and a dielectric natural frequency meet the experimental requirements. Through PID control, the hysteresis of nano positioning platform is reduced obviously.<br>
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