The dynamic characteristics of the micromodulation platform are analyzed by modal analysis. Figure 9 shows the results of the first two-order natural frequency modal analysis of the micro-dynamic platform, the first-order natural frequency is 471.35Hz, the theoretical calculation value is 521.38Hz, the first-order vibration type is the horizontal movement of the output platform along the X axis, and the relative error between the finite meta-analysis results and the theoretical calculation is 10.61%. The second vibration model shows that the output platform rotates around its rotating center at an inherent frequency of 782.02Hz. From the modal analysis results, the micro-dynamic platform has good dynamic characteristics and is suitable for high-frequency micro-operation tasks
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