利用Ansys软件对微动平台的性能进行分析，在SR机构的输入端施加20

Using Ansys software to analyze the performance of the micro-motion platform, apply a 20μm displacement at the input end of the SR mechanism, and get the maximum displacement of the micro-motion platform as 212.13μm, as shown in Figure 8a, where the x-axis output displacement is 131.78μm. The calculated rotation angle of the micro-motion platform is 18.64mrad, the theoretical rotation angle is 16.85mrad, and the relative error is 9.60%, which is consistent with the analysis result of the analytical model. In addition, the maximum stress of the micro-motion platform is 138.11MPa, which appears at the flexible hinge of the SR mechanism, as shown in Figure 8b, which is much smaller than the yield strength of the material (503MPa). The end effector is subjected to constant force and can be calculated Its output stiffness mathbit{K}out is N/μm. The finite element simulation and theoretical calculation results are shown in Table 2.

Using Ansys software to analyze the performance of the micro-platform, the displacement of 20 m is applied to the input of the SR machine, and the maximum displacement of the micro-platform is 212.13 m, as shown in Figure 8a, where the output displacement of the x-axis is 131.78 m. The calculation micro-platform rotation angle is 18.64mrad and the theoretical rotation angle is 16.85mrad, with a relative error of 9.60%, which is in line with the analysis results of the analytical model. In addition, the maximum stress of the micro-platform is 138.11MPa, which appears at the flexible hinges of the SR body, as shown in Figure 8b, far less than the yield strength (503MPa) of the material. It is subjected to constant force on the end-executor, and its output stiffness can be calculated as N/m. The results of finite meta simulation and theoretical calculation are shown in Table 2.

The performance of the micro motion platform is analyzed by using ANSYS software. The maximum displacement of the micro motion platform is 212.13 μ m when 20 μ m displacement is applied at the input end of the SR mechanism. As shown in Fig. 8a, the output displacement of the x-axis is 131.78 μ M. The calculated rotation angle of the micro motion platform is 18.64 mrad, and the theoretical rotation angle is 16.85 mrad. The relative error is 9.60%, which is consistent with the analytical model. In addition, the maximum stress of the micro motion platform is 138.11mpa, which appears at the flexure hinge of the SR mechanism, as shown in Fig. 8b, which is far less than the yield strength of the material (503mpa). Under the action of constant force on the end effector, its output stiffness can be calculated as n / μ M. The results of finite element simulation and theoretical calculation are shown in Table 2.<br>