论文2.1节中已经描述了柔性铰链的力与变形的关系，在使用有限元法评定微

The relationship between the force and deformation of the flexure hinge has been described in section 2.1 of the paper. When using the finite element method to evaluate the stiffness of the micro-motion platform, all links and flexure hinges are regarded as flexible beams with small deformations [34]. The rigid rod and the flexible hinge in the mechanism are both used as a basic unit, composed of two nodes. The finite element model of the micro-motion platform is shown in Figure 7. There are 43 nodes in total, of which 14 nodes in the X direction and 27 nodes in the Y direction. The input node number is marked as 1, and the output platform is described by nodes 19, 20, 25 and 27.

The relationship between force and deformation of flexible hinges has been described in section 2.1, and all connecting rods and flexible hinges are regarded as flexible beams with small deformation when using finite meta-method to assess the stiffness of the micro-dynamic platform. The rigid rod and flexible hinge in the mechanism are as a basic unit, consisting of two nodes, the finite metamode model of the micro-dynamic platform is shown in Figure 7, there are 43 nodes, of which 14 are X-direction nodes, 27 are Y-direction nodes, the input node number is recorded as 1, and the output platform is described by nodes 19, 20, 25 and 27.

The relationship between force and deformation of flexure hinges has been described in Section 2.1 of the paper. When the stiffness of micro motion platform is evaluated by finite element method, all connecting rods and flexure hinges are regarded as flexible beams with small deformation [34]. The rigid bar and flexure hinge in the mechanism are regarded as a basic unit, which are composed of two nodes. The finite element model of micro motion platform is shown in Fig. 7, with a total of 43 nodes, including 14 nodes in X direction and 27 nodes in Y direction. The input node number is 1, and the output platform is described by nodes 19, 20, 25 and 27.